Electron-beam deposition of metals for mask repair
نویسندگان
چکیده
منابع مشابه
Focused electron beam induced deposition: A perspective
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ژورنال
عنوان ژورنال: Microscopy and Microanalysis
سال: 2003
ISSN: 1431-9276,1435-8115
DOI: 10.1017/s1431927603444929